Multilayer film etchant "KSMF Series"
Wet etchant for Al multilayer films, enabling precise etching of Ti/Al/Ti stacks.
It is an etching solution that can process Al multilayer films in a single liquid. It can also be applied to Ti/Al/Ti multilayer films, which have been difficult to wet etch until now. 【Features】 ■ Capable of etching Ti/Al/Ti multilayer films and Mo/Al/Mo multilayer films all at once ■ KSMF-100 can also be used as a low-taper etching solution for Mo single films and Al single films, in addition to Mo/Al/Mo multilayer films ■ KSMF-260 enables taper etching of Ti/Al/Ti multilayer films *For more details, please feel free to contact us.
- Company：KANTO CHEMICAL CO., INC. Electronics Material Division
- Price：Other
